Essay On Thermal Actuators

Essay About Encapsulation Of Mems Devices And Thin Conformal Hydrophobic Layer
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Encapsulation of Mems DevicesThis paper presents a innovative technique for encapsulation of MEMS devices. The technique is established to address two issues related to the use of in-plane thermal actuators for BioMEMS applications. First, an encapsulation process is described to provide protection to a MEMS actuator. The encapsulation structure consists of a multilayer wall and.

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